Bulletin of the
Korean Mathematical Society
BKMS

ISSN(Print) 1015-8634 ISSN(Online) 2234-3016

Article

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Bull. Korean Math. Soc. 2012; 49(4): 705-714

Printed July 1, 2012

https://doi.org/10.4134/BKMS.2012.49.4.705

Copyright © The Korean Mathematical Society.

Mathematical analysis of nonlinear differential equation arising in MEMS

Ruifeng Zhang and Na Li

Henan University, Wan fang College of Science Technology HPU

Abstract

In this paper, we study nonlinear equation arising in MEMS modeling electrostatic actuation. We will prove the local and global existence of solutions of the generalized parabolic MEMS equation. We present that there exists a constant $\lambda^{*}$ such that the associated stationary problem has a solution for any $\lambda < \lambda^{*}$ and no solution for any $\lambda > \lambda^{*}$. We show that when $\lambda < \lambda^{*}$ the global solution converges to its unique maximal steady-state as $t\rightarrow\infty$. We also obtain the condition for the existence of a touchdown time $T\leq\infty$ for the dynamical solution. Furthermore, there exists $p_0>1$, as a function of $p$, the pull-in voltage $\lambda^{*}(p)$ is strictly decreasing with respect to $1p_0$.

Keywords: MEMS equation, upper-and-lower solution method, global convergence, touchdown time

MSC numbers: 35K55, 35K65, 35B40